diff --git a/build/linux/installer/conf/telegraf-ama-logs-process-metrics.conf b/build/linux/installer/conf/telegraf-ama-logs-process-metrics.conf
index 79c7bf941..02da70302 100644
--- a/build/linux/installer/conf/telegraf-ama-logs-process-metrics.conf
+++ b/build/linux/installer/conf/telegraf-ama-logs-process-metrics.conf
@@ -31,6 +31,7 @@
     AgentVersion = "$AGENT_VERSION"
     ControllerType = "$CONTROLLER_TYPE"
     AksResourceId = "$AKS_RESOURCE_ID"
+    ProcessName = "mdsd"
 
 [[inputs.procstat]]
   name_prefix = "t.azm.ms/"
@@ -46,10 +47,11 @@
     AgentVersion = "$AGENT_VERSION"
     ControllerType = "$CONTROLLER_TYPE"
     AksResourceId = "$AKS_RESOURCE_ID"
+    ProcessName = "fluent-bit"
 
 [[inputs.procstat]]
   name_prefix = "t.azm.ms/"
-  exe = "telegraf"
+  pattern = "telegraf(-rs|-prom-side-car)?.conf"
   interval = "60s"
   pid_finder = "native"
   pid_tag = true
@@ -61,10 +63,11 @@
     AgentVersion = "$AGENT_VERSION"
     ControllerType = "$CONTROLLER_TYPE"
     AksResourceId = "$AKS_RESOURCE_ID"
+    ProcessName = "telegraf"
 
 [[inputs.procstat]]
   name_prefix = "t.azm.ms/"
-  exe = "ruby"
+  pattern = "telegraf-ama-logs-process-metrics.conf"
   interval = "60s"
   pid_finder = "native"
   pid_tag = true
@@ -76,6 +79,25 @@
     AgentVersion = "$AGENT_VERSION"
     ControllerType = "$CONTROLLER_TYPE"
     AksResourceId = "$AKS_RESOURCE_ID"
+    ProcessName = "telegraf-process-metrics"
+
+[[inputs.procstat]]
+  name_prefix = "t.azm.ms/"
+  interval = "60s"
+  pid_finder = "native"
+  pid_tag = true
+  name_override = "agent_telemetry"
+  fieldpass = ["cpu_usage", "memory_rss"]
+  [inputs.procstat.tags]
+    Computer = "placeholder_hostname"
+    PodName = "placeholder_podname"
+    AgentVersion = "$AGENT_VERSION"
+    ControllerType = "$CONTROLLER_TYPE"
+    AksResourceId = "$AKS_RESOURCE_ID"
+    ProcessName = "fluentd"
+  [[inputs.procstat.filter]]
+    name = "fluentd"
+    process_names = ["fluentd"]
 
 [[inputs.procstat]]
   name_prefix = "t.azm.ms/"
@@ -91,6 +113,7 @@
     AgentVersion = "$AGENT_VERSION"
     ControllerType = "$CONTROLLER_TYPE"
     AksResourceId = "$AKS_RESOURCE_ID"
+    ProcessName = "crond"
 
 [[inputs.procstat]]
   name_prefix = "t.azm.ms/"
@@ -106,10 +129,10 @@
     AgentVersion = "$AGENT_VERSION"
     ControllerType = "$CONTROLLER_TYPE"
     AksResourceId = "$AKS_RESOURCE_ID"
+    ProcessName = "inotifywait"
 
 [[inputs.procstat]]
   name_prefix = "t.azm.ms/"
-  pattern = "fluentd"
   interval = "60s"
   pid_finder = "native"
   pid_tag = true
@@ -121,6 +144,10 @@
     AgentVersion = "$AGENT_VERSION"
     ControllerType = "$CONTROLLER_TYPE"
     AksResourceId = "$AKS_RESOURCE_ID"
+    ProcessName = "ruby"
+  [[inputs.procstat.filter]]
+    name = "ruby"
+    process_names = ["ruby"]
 
 [[inputs.procstat]]
   name_prefix = "t.azm.ms/"
@@ -136,3 +163,4 @@
     AgentVersion = "$AGENT_VERSION"
     ControllerType = "$CONTROLLER_TYPE"
     AksResourceId = "$AKS_RESOURCE_ID"
+    ProcessName = "main"
diff --git a/build/windows/installer/conf/telegraf-ama-logs-process-metrics.conf b/build/windows/installer/conf/telegraf-ama-logs-process-metrics.conf
index 0acebd90f..e499d3574 100644
--- a/build/windows/installer/conf/telegraf-ama-logs-process-metrics.conf
+++ b/build/windows/installer/conf/telegraf-ama-logs-process-metrics.conf
@@ -29,10 +29,11 @@
     AgentVersion = "$AGENT_VERSION"
     ControllerType = "DaemonSet-Windows"
     AksResourceId = "placeholder_aksresourceid"
+    ProcessName = "fluent-bit"
 
 [[inputs.procstat]]
   name_prefix = "t.azm.ms/"
-  exe = "telegraf"
+  pattern = "telegraf.conf"
   interval = "60s"
   pid_finder = "native"
   pid_tag = true
@@ -44,6 +45,23 @@
     AgentVersion = "$AGENT_VERSION"
     ControllerType = "DaemonSet-Windows"
     AksResourceId = "placeholder_aksresourceid"
+    ProcessName = "telegraf"
+
+[[inputs.procstat]]
+  name_prefix = "t.azm.ms/"
+  pattern = "telegraf-ama-logs-process-metrics.conf"
+  interval = "60s"
+  pid_finder = "native"
+  pid_tag = true
+  name_override = "agent_telemetry"
+  fieldpass = ["cpu_usage", "memory_rss"]
+  [inputs.procstat.tags]
+    Computer = "placeholder_hostname"
+    PodName = "placeholder_podname"
+    AgentVersion = "$AGENT_VERSION"
+    ControllerType = "DaemonSet-Windows"
+    AksResourceId = "placeholder_aksresourceid"
+    ProcessName = "telegraf-process-metrics"
 
 [[inputs.procstat]]
   name_prefix = "t.azm.ms/"
@@ -59,6 +77,7 @@
     AgentVersion = "$AGENT_VERSION"
     ControllerType = "DaemonSet-Windows"
     AksResourceId = "placeholder_aksresourceid"
+    ProcessName = "MonAgentLauncher"
 
 [[inputs.procstat]]
   name_prefix = "t.azm.ms/"
@@ -74,6 +93,7 @@
     AgentVersion = "$AGENT_VERSION"
     ControllerType = "DaemonSet-Windows"
     AksResourceId = "placeholder_aksresourceid"
+    ProcessName = "MonAgentCore"
 
 [[inputs.procstat]]
   name_prefix = "t.azm.ms/"
@@ -89,6 +109,7 @@
     AgentVersion = "$AGENT_VERSION"
     ControllerType = "DaemonSet-Windows"
     AksResourceId = "placeholder_aksresourceid"
+    ProcessName = "MonAgentHost"
 
 [[inputs.procstat]]
   name_prefix = "t.azm.ms/"
@@ -104,6 +125,7 @@
     AgentVersion = "$AGENT_VERSION"
     ControllerType = "DaemonSet-Windows"
     AksResourceId = "placeholder_aksresourceid"
+    ProcessName = "MonAgentManager"
 
 [[inputs.procstat]]
   name_prefix = "t.azm.ms/"
@@ -119,6 +141,7 @@
     AgentVersion = "$AGENT_VERSION"
     ControllerType = "DaemonSet-Windows"
     AksResourceId = "placeholder_aksresourceid"
+    ProcessName = "AzurePerfCollectorExtension"
 
 [[inputs.procstat]]
   name_prefix = "t.azm.ms/"
@@ -134,6 +157,7 @@
     AgentVersion = "$AGENT_VERSION"
     ControllerType = "DaemonSet-Windows"
     AksResourceId = "placeholder_aksresourceid"
+    ProcessName = "AzureProfilerExtension"
 
 [[inputs.procstat]]
   name_prefix = "t.azm.ms/"
@@ -149,6 +173,7 @@
     AgentVersion = "$AGENT_VERSION"
     ControllerType = "DaemonSet-Windows"
     AksResourceId = "placeholder_aksresourceid"
+    ProcessName = "AggregatorHost"
 
 [[inputs.procstat]]
   name_prefix = "t.azm.ms/"
@@ -164,3 +189,4 @@
     AgentVersion = "$AGENT_VERSION"
     ControllerType = "DaemonSet-Windows"
     AksResourceId = "placeholder_aksresourceid"
+    ProcessName = "powershell"